{"id":3475,"date":"2025-03-24T14:39:38","date_gmt":"2025-03-24T05:39:38","guid":{"rendered":"https:\/\/matlantis.com\/?post_type=news&#038;p=3475"},"modified":"2025-03-24T15:13:35","modified_gmt":"2025-03-24T06:13:35","slug":"analysis-of-urface-reaction-mechanism-between-ald-precursor-and-substrate","status":"publish","type":"news","link":"https:\/\/matlantis.com\/ja\/news\/analysis-of-urface-reaction-mechanism-between-ald-precursor-and-substrate\/","title":{"rendered":"\u3010\u8a08\u7b97\u4e8b\u4f8b\u516c\u958b\u3011ALD\u524d\u99c6\u4f53\u3068Si\u57fa\u677f\u3068\u306e\u8868\u9762\u53cd\u5fdc\u6a5f\u69cb\u89e3\u6790"},"content":{"rendered":"\n<p><a href=\"https:\/\/matlantis.com\/ja\/cases#calculation\">\u8a08\u7b97\u4e8b\u4f8b\u30da\u30fc\u30b8<\/a>\u306b\u65b0\u305f\u306aMatlantis\u9069\u7528\u4e8b\u4f8b\u3092\u516c\u958b\u3057\u307e\u3057\u305f\u3002<br>\u3053\u306e\u4e8b\u4f8b\u3067\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u3068\u3057\u3066\u91cd\u8981\u306a\u6280\u8853\u306e\u4e00\u3064\u3067\u3042\u308b\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\uff08Atomic Layer Deposition: ALD\uff09\u306b\u3064\u3044\u3066\u3001\u5806\u7a4d\u7269\u306e\u524d\u99c6\u4f53\u3068\u306a\u308b\u7269\u8cea\u3068\u5806\u7a4d\u3059\u308b\u57fa\u76e4\u3068\u306e\u9593\u3067\u8d77\u3053\u308b\u8868\u9762\u53cd\u5fdc\u3064\u3044\u3066\u89e3\u6790\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u8a18\u4e8b\u5168\u6587\u306f\u3053\u3061\u3089\u304b\u3089:\u00a0<a href=\"https:\/\/matlantis.com\/ja\/calculation\/analysis-of-urface-reaction-mechanism-between-ald-precursor-and-substrate\">ALD\u524d\u99c6\u4f53\u3068Si\u57fa\u677f\u3068\u306e\u8868\u9762\u53cd\u5fdc\u6a5f\u69cb\u89e3\u6790<\/a><\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"688\" height=\"480\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2025\/03\/20250321_Analysis-of-surface-reaction-mechanism_eyecatch.gif\" alt=\"\" class=\"wp-image-3460\"\/><\/figure>\n","protected":false},"featured_media":3460,"template":"","meta":{"_acf_changed":false},"news_category":[5],"class_list":["post-3475","news","type-news","status-publish","has-post-thumbnail","hentry","news_category-research-articles-and-use-cases"],"acf":[],"_links":{"self":[{"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/news\/3475","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/news"}],"about":[{"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/types\/news"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/media\/3460"}],"wp:attachment":[{"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/media?parent=3475"}],"wp:term":[{"taxonomy":"news_category","embeddable":true,"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/news_category?post=3475"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}