{"id":6681,"date":"2026-05-28T18:23:49","date_gmt":"2026-05-28T09:23:49","guid":{"rendered":"https:\/\/matlantis.com\/ja\/?post_type=pfnblog&#038;p=6681"},"modified":"2026-06-05T21:44:17","modified_gmt":"2026-06-05T12:44:17","slug":"semiconductor-front-end-process","status":"publish","type":"pfnblog","link":"https:\/\/matlantis.com\/ja\/resources\/blog\/semiconductor-front-end-process\/","title":{"rendered":"\u534a\u5c0e\u4f53\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3068\u306f\uff1f\u6210\u819c\u30fb\u30d5\u30a9\u30c8\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0\u30fbCMP\u306a\u3069\u524d\u5de5\u7a0b\u3092\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u8996\u70b9\u3067\u5fb9\u5e95\u89e3\u8aac"},"content":{"rendered":"\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"576\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2026\/05\/image_blog_semi-1024x576.jpg\" alt=\"\u534a\u5c0e\u4f53\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3068\u306f\uff1f\u6210\u819c\u30fb\u30d5\u30a9\u30c8\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0\u30fbCMP\u306a\u3069\u524d\u5de5\u7a0b\u3092\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u8996\u70b9\u3067\u5fb9\u5e95\u89e3\u8aac\n\" class=\"wp-image-6702\"\/><\/figure>\n\n\n\n<p>\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u4e0a\u306b\u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u306e\u69cb\u9020\u3092\u5f62\u6210\u3059\u308b\u3053\u3068\u3067\u4f5c\u3089\u308c\u307e\u3059\u3002\u6210\u819c\u3001\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u3001\u30a4\u30aa\u30f3\u6ce8\u5165\u3001\u5e73\u5766\u5316\u306a\u3069\u3001\u591a\u304f\u306e\u5de5\u7a0b\u3092\u7e70\u308a\u8fd4\u3057\u306a\u304c\u3089\u3001\u30a6\u30a7\u30cf\u4e0a\u306b\u5fae\u7d30\u306a\u56de\u8def\u69cb\u9020\u3092\u4f5c\u308a\u8fbc\u3093\u3067\u3044\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3053\u3046\u3057\u305f\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u6750\u6599\u306e\u7269\u6027\u3084\u8868\u9762\u30fb\u754c\u9762\u3067\u8d77\u3053\u308b\u53cd\u5fdc\u304c\u3001\u30c7\u30d0\u30a4\u30b9\u6027\u80fd\u3084\u6b69\u7559\u307e\u308a\u306b\u5927\u304d\u304f\u5f71\u97ff\u3057\u307e\u3059\u3002\u8fd1\u5e74\u306f\u30c7\u30d0\u30a4\u30b9\u306e\u5fae\u7d30\u5316\u304c\u9032\u307f\u3001\u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u3067\u306e\u6750\u6599\u6319\u52d5\u304c\u30d7\u30ed\u30bb\u30b9\u306e\u6210\u5426\u3092\u5de6\u53f3\u3059\u308b\u5834\u9762\u3082\u5897\u3048\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3057\u304b\u3057\u3001\u3053\u3046\u3057\u305f\u73fe\u8c61\u306e\u591a\u304f\u306f\u5b9f\u9a13\u3060\u3051\u3067\u8a73\u7d30\u306b\u7406\u89e3\u3059\u308b\u3053\u3068\u304c\u96e3\u3057\u304f\u3001\u6750\u6599\u306e\u632f\u308b\u821e\u3044\u3092\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u89e3\u6790\u3059\u308b\u624b\u6cd5\u306e\u91cd\u8981\u6027\u304c\u9ad8\u307e\u3063\u3066\u3044\u307e\u3059\u3002\u305d\u306e\u305f\u3081\u8fd1\u5e74\u3067\u306f\u3001\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3092\u6d3b\u7528\u3057\u3066\u8868\u9762\u53cd\u5fdc\u3084\u6750\u6599\u6319\u52d5\u3092\u7406\u89e3\u3059\u308b\u7814\u7a76\u304c\u5e83\u304f\u884c\u308f\u308c\u308b\u3088\u3046\u306b\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u672c\u8a18\u4e8b\u3067\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306e\u4e2d\u3067\u3082\u300c\u524d\u5de5\u7a0b\u300d\u3068\u3044\u308f\u308c\u308b\u5de5\u7a0b\u3092\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u306e\u8996\u70b9\u304b\u3089\u4fef\u77b0\u3057\u306a\u304c\u3089\u89e3\u8aac\u3057\u307e\u3059\u3002\u307e\u305a\u534a\u5c0e\u4f53\u3068\u306f\u4f55\u304b\u3001\u3069\u306e\u3088\u3046\u306a\u6d41\u308c\u3067\u30c7\u30d0\u30a4\u30b9\u304c\u4f5c\u3089\u308c\u308b\u306e\u304b\u3092\u6574\u7406\u3057\u305f\u3046\u3048\u3067\u3001\u5404\u5de5\u7a0b\u306e\u76ee\u7684\u3084\u6280\u8853\u8ab2\u984c\u3001\u305d\u3053\u3067\u884c\u308f\u308c\u3066\u3044\u308b\u6750\u6599\u7814\u7a76\u306b\u3064\u3044\u3066\u7d39\u4ecb\u3057\u3066\u3044\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u3053\u306e\u8a18\u4e8b\u3067\u308f\u304b\u308b\u3053\u3068<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u534a\u5c0e\u4f53\u3068\u306f\u4f55\u304b\uff1f\u30a6\u30a7\u30cf\u30fb\u30c0\u30a4\u30fb\u914d\u7dda\u5c64\u306a\u3069\u57fa\u672c\u69cb\u9020\u306e\u7406\u89e3<\/li>\n\n\n\n<li>\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u524d\u5de5\u7a0b\u3068\u5f8c\u5de5\u7a0b\u306e\u9055\u3044<\/li>\n\n\n\n<li>\u524d\u5de5\u7a0b\uff08\u6210\u819c\u3001\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u3001\u30a4\u30aa\u30f3\u6ce8\u5165\u3001\u30a2\u30cb\u30fc\u30eb\u3001CMP\u3001\u6d17\u6d44\uff09\u306e\u5f79\u5272<\/li>\n\n\n\n<li>\u5fae\u7d30\u5316\u306b\u3088\u3063\u3066\u5404\u5de5\u7a0b\u3067\u4f55\u304c\u96e3\u3057\u304f\u306a\u3063\u3066\u3044\u308b\u306e\u304b<\/li>\n\n\n\n<li>\u5404\u5de5\u7a0b\u3067\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u304c\u3069\u306e\u3088\u3046\u306b\u6d3b\u7528\u3055\u308c\u3066\u3044\u308b\u306e\u304b\uff08\u8a08\u7b97\u4e8b\u4f8b\uff09<\/li>\n\n\n\n<li>\u4f01\u696d\u3084\u7814\u7a76\u6a5f\u95a2\u306b\u304a\u3051\u308b\u534a\u5c0e\u4f53\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u306e\u6d3b\u7528\u4f8b\uff08\u8ad6\u6587\u7d39\u4ecb\uff09<\/li>\n<\/ul>\n\n\n\n<p><\/p>\n\n\n\n<p><\/p>\n\n\n\n<p><strong>\u76ee\u6b21<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><a href=\"#what-is-semiconductor\" data-type=\"internal\" data-id=\"#what-is-semiconductor\">\u534a\u5c0e\u4f53\u3068\u306f\uff1f<\/a><\/li>\n\n\n\n<li><a href=\"#front-back-end-process\" data-type=\"internal\" data-id=\"#front-back-end-process\">\u534a\u5c0e\u4f53\u88fd\u9020\u306e\u524d\u5de5\u7a0b\u3068\u5f8c\u5de5\u7a0b\u3092\u89e3\u8aac<\/a><\/li>\n\n\n\n<li><a href=\"#deposition\">\u539f\u5b50\u3067\u819c\u3092\u4f5c\u308b\u6210\u819c\uff08Deposition\uff09\u3068\u306f<\/a><\/li>\n\n\n\n<li><a href=\"#lithography\" data-type=\"internal\" data-id=\"#lithography\">\u56de\u8def\u30d1\u30bf\u30fc\u30f3\u3092\u8ee2\u5199\u3059\u308b\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3068\u306f<\/a><\/li>\n\n\n\n<li><a href=\"#etching\">\u4e0d\u8981\u306a\u6750\u6599\u3092\u524a\u308b\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u306f<\/a><\/li>\n\n\n\n<li><a href=\"#ion-implantation\" data-type=\"internal\" data-id=\"#ion-implantation\">\u96fb\u6c17\u7279\u6027\u3092\u5236\u5fa1\u3059\u308b\u30a4\u30aa\u30f3\u6ce8\u5165\u3068\u306f<\/a><\/li>\n\n\n\n<li><a href=\"#cmp\">\u8868\u9762\u3092\u5e73\u5766\u5316\u3059\u308bCMP\u3068\u306f<\/a><\/li>\n\n\n\n<li><a href=\"#cleaning\" data-type=\"internal\" data-id=\"#cleaning\">\u8868\u9762\u72b6\u614b\u3092\u5236\u5fa1\u3059\u308b\u6d17\u6d44<\/a><\/li>\n\n\n\n<li><a href=\"#simulation-examples\">\u4f01\u696d\u306e\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3092\u6d3b\u7528\u3057\u305f\u7814\u7a76\u958b\u767a\u4f8b<br><\/a><br><\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"what-is-semiconductor\"><strong>\u534a\u5c0e\u4f53\u3068\u306f\uff1f<\/strong><\/h2>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"683\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2026\/05\/\u8757\uff73\u7aed\uf8f0-1024x683.jpg\" alt=\"\u534a\u5c0e\u4f53\u306e\u69cb\u9020\u30a4\u30e1\u30fc\u30b8\" class=\"wp-image-6697\"\/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading has-text-align-center\">\u534a\u5c0e\u4f53\u306e\u69cb\u9020\u30a4\u30e1\u30fc\u30b8<\/h4>\n\n\n\n<p>\u534a\u5c0e\u4f53\u3068\u306f\u3001\u96fb\u6c17\u3092\u3088\u304f\u901a\u3059<strong>\u5c0e\u4f53<\/strong>\u3068\u3001\u307b\u3068\u3093\u3069\u96fb\u6c17\u3092\u901a\u3055\u306a\u3044<strong>\u7d76\u7e01\u4f53<\/strong>\u306e\u4e2d\u9593\u7684\u306a\u6027\u8cea\u3092\u6301\u3064\u6750\u6599\u306e\u3053\u3068\u3092\u6307\u3057\u307e\u3059\u3002\u3053\u3046\u3057\u305f\u6027\u8cea\u3092\u6301\u3064\u3053\u3068\u304b\u3089\u3001\u300c\u5c0e\u4f53\u3067\u3082\u7d76\u7e01\u4f53\u3067\u3082\u306a\u3044\u3001\u305d\u306e\u201c\u534a\u3070\u201d\u306e\u6027\u8cea\u3092\u6301\u3064\u6750\u6599\u300d\u3068\u3044\u3046\u610f\u5473\u3067<strong>\u534a\u5c0e\u4f53<\/strong>\u3068\u547c\u3070\u308c\u3066\u3044\u307e\u3059\u3002\u4ee3\u8868\u7684\u306a\u6750\u6599\u3068\u3057\u3066\u306f\u30b7\u30ea\u30b3\u30f3\u304c\u3042\u308a\u3001\u3053\u306e\u6027\u8cea\u3092\u5229\u7528\u3057\u3066\u96fb\u6d41\u306e\u6d41\u308c\u3092\u5236\u5fa1\u3059\u308b\u96fb\u5b50\u90e8\u54c1\u304c\u4f5c\u3089\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u3067\u306f\u3001\u3053\u306e\u96fb\u6d41\u306e\u6d41\u308c\u3092\u5236\u5fa1\u3059\u308b\u305f\u3081\u306e\u69cb\u9020\u3092\u30b7\u30ea\u30b3\u30f3\u4e0a\u306b\u4f5c\u308a\u8fbc\u307f\u307e\u3059\u3002\u73fe\u5728\u306e\u534a\u5c0e\u4f53\u30c1\u30c3\u30d7\u306e\u5185\u90e8\u306b\u306f\u3001\u96fb\u6c17\u4fe1\u53f7\u3092\u5236\u5fa1\u3059\u308b\u7d20\u5b50\u3084\u3001\u305d\u308c\u3089\u3092\u63a5\u7d9a\u3059\u308b\u914d\u7dda\u5c64\u306a\u3069\u304c\u8907\u96d1\u306b\u914d\u7f6e\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u3053\u3046\u3057\u305f\u96fb\u5b50\u56de\u8def\u306e\u57fa\u672c\u8981\u7d20\u3068\u306a\u308b\u306e\u304c<strong>\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf<\/strong>\u3067\u3042\u308a\u3001\u73fe\u4ee3\u306e\u30b3\u30f3\u30d4\u30e5\u30fc\u30bf\u3084\u30b9\u30de\u30fc\u30c8\u30d5\u30a9\u30f3\u3001\u8eca\u8f09\u6a5f\u5668\u306a\u3069\u306e\u96fb\u5b50\u6a5f\u5668\u306f\u3001\u81a8\u5927\u306a\u6570\u306e\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3092\u96c6\u7a4d\u3057\u305f\u56de\u8def\u306b\u3088\u3063\u3066\u52d5\u4f5c\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u534a\u5c0e\u4f53\u30c1\u30c3\u30d7\u306e\u69cb\u9020\u306f\u3001\u5358\u7d14\u306a\u5e73\u9762\u3067\u306f\u306a\u304f\u591a\u5c64\u306e\u7acb\u4f53\u69cb\u9020\u306b\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u306e\u8868\u9762\u306b\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306a\u3069\u306e\u7d20\u5b50\u304c\u5f62\u6210\u3055\u308c\u3001\u305d\u306e\u4e0a\u306b\u8907\u6570\u306e\u91d1\u5c5e\u914d\u7dda\u5c64\u304c\u7a4d\u307f\u91cd\u306a\u308b\u3053\u3068\u3067\u56de\u8def\u304c\u69cb\u6210\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3053\u3046\u3057\u305f\u56de\u8def\u69cb\u9020\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u306e\u5186\u76e4\u3067\u3042\u308b\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u306e\u8868\u9762\u306b\u5f62\u6210\u3055\u308c\u307e\u3059\u3002\u30a6\u30a7\u30cf\u4e0a\u306b\u306f\u540c\u3058\u56de\u8def\u304c\u591a\u6570\u4f5c\u3089\u308c\u3001\u305d\u306e\u4e00\u3064\u4e00\u3064\u306e\u56de\u8def\u30d6\u30ed\u30c3\u30af\u306f\u30c0\u30a4\uff08die\uff09\u3068\u547c\u3070\u308c\u307e\u3059\u3002\u88fd\u9020\u306e\u6700\u7d42\u6bb5\u968e\u3067\u306f\u30a6\u30a7\u30cf\u3092\u3053\u306e\u30c0\u30a4\u5358\u4f4d\u306b\u5207\u308a\u5206\u3051\u3001\u305d\u308c\u305e\u308c\u304c\u534a\u5c0e\u4f53\u30c1\u30c3\u30d7\u3068\u3057\u3066\u30d1\u30c3\u30b1\u30fc\u30b8\u5316\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u8fd1\u5e74\u306e\u6700\u5148\u7aef\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u30012nm\u4e16\u4ee3\u3001\u3055\u3089\u306b\u306f1.4nm\u7d1a\u307e\u3067\u898b\u636e\u3048\u305f\u5fae\u7d30\u5316\u304c\u9032\u307f\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3084\u914d\u7dda\u306f\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30b9\u30b1\u30fc\u30eb\u3067\u8a2d\u8a08\u30fb\u88fd\u9020\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u3053\u3046\u3057\u305f\u5fae\u7d30\u5316\u306f\u3001\u9ad8\u6027\u80fd\u5316\u3068\u4f4e\u6d88\u8cbb\u96fb\u529b\u5316\u3092\u5b9f\u73fe\u3059\u308b\u305f\u3081\u306b\u9032\u3081\u3089\u308c\u3066\u304d\u307e\u3057\u305f\u3002\u3057\u304b\u3057\u6570\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u306e\u4e16\u754c\u3067\u306f\u3001\u307b\u3093\u306e\u308f\u305a\u304b\u306a\u5bf8\u6cd5\u306e\u3070\u3089\u3064\u304d\u3084\u6750\u6599\u5dee\u3067\u3082\u3001\u30c7\u30d0\u30a4\u30b9\u6027\u80fd\u306b\u7121\u8996\u3067\u304d\u306a\u3044\u5f71\u97ff\u3092\u53ca\u307c\u3057\u307e\u3059\u3002\u6750\u6599\u7269\u6027\u3084\u754c\u9762\u53cd\u5fdc\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u306e\u69cb\u9020\u305d\u306e\u3082\u306e\u304c\u6027\u80fd\u3092\u5de6\u53f3\u3059\u308b\u305f\u3081\u3001\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306e\u5236\u5fa1\u306f\u3053\u308c\u307e\u3067\u4ee5\u4e0a\u306b\u96e3\u3057\u304f\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"front-back-end-process\"><strong>\u534a\u5c0e\u4f53\u88fd\u9020\u306e\u524d\u5de5\u7a0b\u3068\u5f8c\u5de5\u7a0b\u3092\u89e3\u8aac<\/strong><\/h2>\n\n\n\n<p>\u534a\u5c0e\u4f53\u88fd\u9020\u3067\u306f\u3001\u3053\u306e\u30c0\u30a4\u306e\u5185\u90e8\u306b\u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u306e\u69cb\u9020\u3092\u4f5c\u308a\u8fbc\u3080\u305f\u3081\u306b\u3001\u591a\u304f\u306e\u30d7\u30ed\u30bb\u30b9\u304c\u7e70\u308a\u8fd4\u3055\u308c\u307e\u3059\u3002\u3053\u3046\u3057\u305f\u5de5\u7a0b\u306f\u5927\u304d\u304f\u524d\u5de5\u7a0b\u3068\u5f8c\u5de5\u7a0b\u306b\u5206\u3051\u3089\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u524d\u5de5\u7a0b\uff08Front End Process\uff09\u3067\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u4e0a\u306b\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3084\u914d\u7dda\u306a\u3069\u306e\u56de\u8def\u69cb\u9020\u3092\u5f62\u6210\u3057\u307e\u3059\u3002\u4ee3\u8868\u7684\u306a\u30d7\u30ed\u30bb\u30b9\u3068\u3057\u3066\u306f\u3001\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u6210\u819c\uff08Deposition\uff09\u3001\u56de\u8def\u30d1\u30bf\u30fc\u30f3\u3092\u5f62\u6210\u3059\u308b\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\uff08Lithography\uff09\u3001\u4e0d\u8981\u306a\u6750\u6599\u3092\u9664\u53bb\u3059\u308b\u30a8\u30c3\u30c1\u30f3\u30b0\uff08Etching\uff09\u3001\u4e0d\u7d14\u7269\u3092\u5c0e\u5165\u3057\u3066\u96fb\u6c17\u7279\u6027\u3092\u8abf\u6574\u3059\u308b\u30a4\u30aa\u30f3\u6ce8\u5165\uff08Ion Implantation\uff09\u3001\u8868\u9762\u3092\u5e73\u5766\u5316\u3059\u308bCMP\uff08Chemical Mechanical Polishing\uff09\u306a\u3069\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u5de5\u7a0b\u306e\u9593\u306b\u306f\u3001\u5fae\u7c92\u5b50\u3084\u53cd\u5fdc\u6b8b\u6e23\u3092\u9664\u53bb\u3059\u308b\u6d17\u6d44\u30d7\u30ed\u30bb\u30b9\u3082\u7e70\u308a\u8fd4\u3057\u884c\u308f\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u6700\u5148\u7aef\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u3067\u306f\u3001\u3053\u3046\u3057\u305f\u5de5\u7a0b\u304c\u6570\u767e\u56de\u4ee5\u4e0a\u7e70\u308a\u8fd4\u3055\u308c\u3001\u6750\u6599\u7d44\u6210\u3001\u6e29\u5ea6\u3001\u5727\u529b\u3001\u53cd\u5fdc\u6761\u4ef6\u306a\u3069\u591a\u304f\u306e\u30d7\u30ed\u30bb\u30b9\u30d1\u30e9\u30e1\u30fc\u30bf\u3092\u7cbe\u5bc6\u306b\u5236\u5fa1\u3057\u306a\u304c\u3089\u30c7\u30d0\u30a4\u30b9\u304c\u4f5c\u3089\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u4e00\u65b9\u3001\u5f8c\u5de5\u7a0b\uff08Back End Process\uff09\u3067\u306f\u3001\u524d\u5de5\u7a0b\u3067\u4f5c\u3089\u308c\u305f\u30a6\u30a7\u30cf\u3092\u30c0\u30a4\u5358\u4f4d\u306b\u5207\u65ad\u3057\u3001\u305d\u308c\u305e\u308c\u306e\u30c1\u30c3\u30d7\u3092\u30d1\u30c3\u30b1\u30fc\u30b8\u3068\u3057\u3066\u7d44\u307f\u7acb\u3066\u307e\u3059\u3002\u30c0\u30a4\u30b7\u30f3\u30b0\u3001\u5b9f\u88c5\u3001\u5c01\u6b62\u306a\u3069\u306e\u30d7\u30ed\u30bb\u30b9\u3092\u901a\u3057\u3066\u3001\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306f\u96fb\u5b50\u6a5f\u5668\u306b\u642d\u8f09\u3067\u304d\u308b\u5f62\u3078\u3068\u4ed5\u4e0a\u3052\u3089\u308c\u307e\u3059\u3002_<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u52a0\u901f\u3059\u308b\u5fae\u7d30\u5316\u3068\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3<\/strong>\u3000<\/h3>\n\n\n\n<p>\u3053\u3046\u3057\u305f\u534a\u5c0e\u4f53\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u6750\u6599\u306e\u7269\u6027\u3084\u8868\u9762\u30fb\u754c\u9762\u3067\u8d77\u3053\u308b\u5316\u5b66\u53cd\u5fdc\u304c\u30d7\u30ed\u30bb\u30b9\u7d50\u679c\u306b\u5927\u304d\u304f\u5f71\u97ff\u3057\u307e\u3059\u3002\u7279\u306b\u30c7\u30d0\u30a4\u30b9\u306e\u5fae\u7d30\u5316\u304c\u9032\u3093\u3060\u73fe\u5728\u3067\u306f\u3001\u6570\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u306e\u819c\u539a\u5236\u5fa1\u3084\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u306e\u8868\u9762\u53cd\u5fdc\u306e\u7406\u89e3\u304c\u91cd\u8981\u306a\u8ab2\u984c\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u305d\u306e\u305f\u3081\u8fd1\u5e74\u3067\u306f\u3001\u3053\u3046\u3057\u305f\u73fe\u8c61\u3092\u7406\u89e3\u3059\u308b\u305f\u3081\u306e\u624b\u6bb5\u3068\u3057\u3066\u3001\u6750\u6599\u306e\u632f\u308b\u821e\u3044\u3092\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u89e3\u6790\u3059\u308b\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u304c\u7814\u7a76\u958b\u767a\u306e\u73fe\u5834\u3067\u6d3b\u7528\u3055\u308c\u308b\u3088\u3046\u306b\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"559\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2026\/05\/image-1-1024x559.png\" alt=\"\u534a\u5c0e\u4f53\u306e\u524d\u5de5\u7a0b\u3068\u5f8c\u5de5\u7a0b\u306e\u6d41\u308c\" class=\"wp-image-6683\"\/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading has-text-align-center\">\u534a\u5c0e\u4f53\u306e\u524d\u5de5\u7a0b\u3068\u5f8c\u5de5\u7a0b\u306e\u6d41\u308c<\/h4>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"deposition\"><strong>\u539f\u5b50\u3067\u819c\u3092\u4f5c\u308b\u6210\u819c\uff08Deposition\uff09\u3068\u306f<\/strong><\/h2>\n\n\n\n<p>\u534a\u5c0e\u4f53\u30c1\u30c3\u30d7\u306e\u5185\u90e8\u3067\u306f\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306a\u3069\u306e\u7d20\u5b50\u3001\u305d\u308c\u3089\u3092\u63a5\u7d9a\u3059\u308b\u914d\u7dda\u3001\u96fb\u6c17\u7684\u306b\u5206\u96e2\u3059\u308b\u305f\u3081\u306e\u7d76\u7e01\u5c64\u306a\u3069\u3001\u3055\u307e\u3056\u307e\u306a\u6a5f\u80fd\u3092\u6301\u3064\u5c64\u304c\u7a4d\u307f\u91cd\u306a\u308b\u3053\u3068\u3067\u56de\u8def\u304c\u69cb\u6210\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u3053\u3046\u3057\u305f\u5c64\u69cb\u9020\u3092\u5f62\u6210\u3059\u308b\u6700\u521d\u306e\u5de5\u7a0b\u304c\u6210\u819c\uff08Deposition\uff09\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u6210\u819c\u3068\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u306e\u8868\u9762\u306b\u6750\u6599\u3092\u8584\u3044\u819c\u3068\u3057\u3066\u5806\u7a4d\u3055\u305b\u308b\u30d7\u30ed\u30bb\u30b9\u3067\u3059\u3002\u534a\u5c0e\u4f53\u88fd\u9020\u3067\u306f\u3001\u3053\u306e\u819c\u306e\u539a\u3055\u306f\u6570\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u304b\u3089\u6570\u5341\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u7a0b\u5ea6\u3068\u975e\u5e38\u306b\u8584\u304f\u3001\u539f\u5b50\u3084\u5206\u5b50\u304c\u8868\u9762\u306b\u4ed8\u7740\u3057\u3066\u7a4d\u307f\u91cd\u306a\u308b\u3053\u3068\u3067\u5f62\u6210\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3053\u306e\u5de5\u7a0b\u3067\u91cd\u8981\u306a\u306e\u306f\u3001<strong>\u3044\u304b\u306b\u8584\u304f\u3001\u5747\u4e00\u306a\u819c\u3092\u5f62\u6210\u3067\u304d\u308b\u304b<\/strong>\u3068\u3044\u3046\u70b9\u3067\u3059\u3002\u819c\u539a\u304c\u5834\u6240\u306b\u3088\u3063\u3066\u3070\u3089\u3064\u3044\u305f\u308a\u3001\u819c\u304c\u6b6a\u3093\u3060\u308a\u3059\u308b\u3068\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u52d5\u4f5c\u306b\u3070\u3089\u3064\u304d\u304c\u751f\u3058\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u307e\u305f\u3001\u819c\u304c\u4e0d\u5747\u4e00\u306b\u306a\u308b\u3068\u57fa\u677f\u3068\u306e\u754c\u9762\u72b6\u614b\u306b\u3082\u5f71\u97ff\u304c\u751f\u3058\u3001\u6b20\u9665\u304c\u767a\u751f\u3057\u3084\u3059\u304f\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3055\u3089\u306b\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u52d5\u4f5c\u306f\u819c\u306e\u539a\u3055\u306b\u5f37\u304f\u4f9d\u5b58\u3059\u308b\u305f\u3081\u3001\u308f\u305a\u304b\u306a\u819c\u539a\u306e\u9055\u3044\u3067\u3082\u6027\u80fd\u304c\u5909\u5316\u3057\u307e\u3059\u3002\u8fd1\u5e74\u306e\u534a\u5c0e\u4f53\u3067\u306f\u5fae\u7d30\u5316\u304c\u9032\u307f\u3001\u30c7\u30d0\u30a4\u30b9\u5bf8\u6cd5\u305d\u306e\u3082\u306e\u304c\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30b9\u30b1\u30fc\u30eb\u306b\u306a\u3063\u3066\u3044\u308b\u305f\u3081\u3001\u305d\u308c\u306b\u5bfe\u5fdc\u3057\u3066\u819c\u3082\u975e\u5e38\u306b\u8584\u304f\u5f62\u6210\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u6210\u819c\u306b\u306f\u3055\u307e\u3056\u307e\u306a\u65b9\u6cd5\u304c\u3042\u308a\u307e\u3059\u304c\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u3067\u306f\u4e3b\u306b\u6b21\u306e\u3088\u3046\u306a\u624b\u6cd5\u304c\u5229\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u6210\u819c\u306e\u624b\u6cd5\u3068\u306f\uff1fPVD\u30fbCVD\u30fb ALD\u306e\u9055\u3044<\/strong><\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>PVD\uff08Physical Vapor Deposition\uff09<\/strong><\/h4>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"683\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2026\/05\/PVD-1024x683.jpg\" alt=\"PVD\uff08Physical Vapor Deposition\uff09\u306e\u4ed5\u7d44\u307f\n\" class=\"wp-image-6698\"\/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading has-text-align-center\">PVD\uff08Physical Vapor Deposition\uff09\u306e\u4ed5\u7d44\u307f<\/h4>\n\n\n\n<p>PVD\u306f\u3001\u6750\u6599\u3092\u7269\u7406\u7684\u306b\u84b8\u767a\u30fb\u98db\u6563\u3055\u305b\u3066\u30a6\u30a7\u30cf\u8868\u9762\u306b\u4ed8\u7740\u3055\u305b\u308b\u65b9\u6cd5\u3067\u3059\u3002\u4ee3\u8868\u7684\u306a\u624b\u6cd5\u3068\u3057\u3066\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u304c\u3042\u308a\u307e\u3059\u3002\u91d1\u5c5e\u819c\u306e\u5f62\u6210\u306b\u5e83\u304f\u5229\u7528\u3055\u308c\u3066\u304a\u308a\u3001\u88c5\u7f6e\u69cb\u9020\u304c\u6bd4\u8f03\u7684\u30b7\u30f3\u30d7\u30eb\u3067\u3042\u308b\u3068\u3044\u3046\u7279\u5fb4\u304c\u3042\u308a\u307e\u3059\u3002\u4e00\u65b9\u3067\u3001\u7c92\u5b50\u304c\u76f4\u9032\u7684\u306b\u98db\u3076\u305f\u3081\u3001\u5fae\u7d30\u306a\u69cb\u9020\u306e\u5965\u307e\u3067\u5747\u4e00\u306b\u819c\u3092\u5f62\u6210\u3059\u308b\u3053\u3068\u304c\u96e3\u3057\u3044\u5834\u5408\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>CVD\uff08Chemical Vapor Deposition\uff09<\/strong><\/h4>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"683\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2026\/05\/CVD-1024x683.jpg\" alt=\"CVD\uff08Chemical Vapor Deposition\uff09\u306e\u4ed5\u7d44\u307f\" class=\"wp-image-6699\"\/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading has-text-align-center\">CVD\uff08Chemical Vapor Deposition\uff09\u306e\u4ed5\u7d44\u307f<\/h4>\n\n\n\n<p>CVD\u306f\u3001\u6c17\u4f53\u72b6\u306e\u524d\u99c6\u4f53\u30ac\u30b9\u3092\u53cd\u5fdc\u3055\u305b\u308b\u3053\u3068\u3067\u3001\u30a6\u30a7\u30cf\u8868\u9762\u306b\u56fa\u4f53\u819c\u3092\u5f62\u6210\u3059\u308b\u65b9\u6cd5\u3067\u3059\u3002\u5316\u5b66\u53cd\u5fdc\u306b\u3088\u3063\u3066\u819c\u304c\u751f\u6210\u3055\u308c\u308b\u305f\u3081\u3001\u6bd4\u8f03\u7684\u5747\u4e00\u306a\u819c\u3092\u5f62\u6210\u3057\u3084\u3059\u304f\u3001\u3055\u307e\u3056\u307e\u306a\u6750\u6599\u306e\u6210\u819c\u306b\u5229\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u305f\u3060\u3057\u3001\u9ad8\u6e29\u30d7\u30ed\u30bb\u30b9\u306b\u306a\u308b\u5834\u5408\u304c\u591a\u304f\u3001\u6750\u6599\u3084\u57fa\u677f\u3078\u306e\u5f71\u97ff\u3092\u8003\u616e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>ALD\uff08Atomic Layer Deposition\uff09<\/strong><\/h4>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"683\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2026\/05\/ALD-1024x683.jpg\" alt=\"ALD\uff08Atomic Layer Deposition\uff09\" class=\"wp-image-6700\"\/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading has-text-align-center\">ALD\uff08Atomic Layer Deposition\uff09\u306e\u4ed5\u7d44\u307f<\/h4>\n\n\n\n<p>ALD\u306f\u3001\u5316\u5b66\u53cd\u5fdc\u3092\u539f\u5b50\u5c64\u5358\u4f4d\u3067\u5236\u5fa1\u3057\u306a\u304c\u3089\u819c\u3092\u5f62\u6210\u3059\u308b\u624b\u6cd5\u3067\u3059\u3002\u53cd\u5fdc\u3092\u6bb5\u968e\u7684\u306b\u9032\u3081\u308b\u3053\u3068\u3067\u3001\u975e\u5e38\u306b\u9ad8\u3044\u819c\u539a\u5236\u5fa1\u3068\u5747\u4e00\u6027\u3092\u5b9f\u73fe\u3067\u304d\u307e\u3059\u3002\u5fae\u7d30\u306a\u69cb\u9020\u306e\u5185\u90e8\u307e\u3067\u5747\u4e00\u306b\u819c\u3092\u5f62\u6210\u3067\u304d\u308b\u305f\u3081\u3001\u6700\u5148\u7aef\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u3067\u91cd\u8981\u306a\u6280\u8853\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u4e00\u65b9\u3067\u3001\u6210\u819c\u901f\u5ea6\u304c\u6bd4\u8f03\u7684\u9045\u3044\u3068\u3044\u3046\u7279\u5fb4\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u6210\u819c\u6750\u6599\u3068\u5fae\u7d30\u5316\u306b\u3088\u308b\u8ab2\u984c<\/strong><\/h3>\n\n\n\n<p>\u534a\u5c0e\u4f53\u306e\u6210\u819c\u5de5\u7a0b\u3067\u306f\u3001\u591a\u69d8\u306a\u6750\u6599\u304c\u4f7f\u308f\u308c\u307e\u3059\u3002\u4ee3\u8868\u7684\u306a\u3082\u306e\u3068\u3057\u3066\u306f\u3001\u7d76\u7e01\u819c\u3068\u3057\u3066\u4f7f\u308f\u308c\u308b\u4e8c\u9178\u5316\u30b1\u30a4\u7d20\uff08SiO\u2082\uff09\u3084\u7a92\u5316\u30b1\u30a4\u7d20\uff08Si\u2083N\u2084\uff09\u3001\u914d\u7dda\u3084\u96fb\u6975\u306b\u7528\u3044\u3089\u308c\u308b\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\uff08W\uff09\u3084\u9285\uff08Cu\uff09\u306a\u3069\u304c\u3042\u308a\u307e\u3059\u3002\u307e\u305f\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u6027\u80fd\u3092\u9ad8\u3081\u308b\u305f\u3081\u306e\u9ad8\u8a98\u96fb\u7387\u6750\u6599\uff08HfO\u2082\u306a\u3069\uff09\u3084\u3001\u914d\u7dda\u5c64\u306e\u30d0\u30ea\u30a2\u6750\u6599\u3068\u3057\u3066\u4f7f\u308f\u308c\u308bTiN\u3084TaN\u306a\u3069\u3082\u91cd\u8981\u306a\u6750\u6599\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u534a\u5c0e\u4f53\u306e\u5fae\u7d30\u5316\u304c\u9032\u3080\u306b\u3064\u308c\u3066\u3001\u3053\u3046\u3057\u305f\u6750\u6599\u306b\u6c42\u3081\u3089\u308c\u308b\u6027\u80fd\u3082\u9ad8\u5ea6\u5316\u3057\u3066\u3044\u307e\u3059\u3002\u819c\u539a\u306f\u6570nm\u30ec\u30d9\u30eb\u307e\u3067\u8584\u304f\u306a\u308a\u3001\u6750\u6599\u306e\u6027\u8cea\u3060\u3051\u3067\u306a\u304f\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u306e\u69cb\u9020\u3084\u754c\u9762\u53cd\u5fdc\u304c\u30c7\u30d0\u30a4\u30b9\u6027\u80fd\u306b\u5927\u304d\u304f\u5f71\u97ff\u3059\u308b\u3088\u3046\u306b\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u305d\u306e\u305f\u3081\u8fd1\u5e74\u3067\u306f\u3001\u3053\u3046\u3057\u305f\u73fe\u8c61\u3092\u7406\u89e3\u3059\u308b\u624b\u6bb5\u3068\u3057\u3066\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u6750\u6599\u69cb\u9020\u3084\u8868\u9762\u53cd\u5fdc\u3092\u89e3\u6790\u3067\u304d\u308b\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u304c\u91cd\u8981\u306a\u5f79\u5272\u3092\u62c5\u3046\u3088\u3046\u306b\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u6210\u819c\u3067\u884c\u308f\u308c\u308b\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u4f8b<\/strong><\/h3>\n\n\n\n<p>\u3067\u306f\u5177\u4f53\u7684\u306b\u3069\u306e\u3088\u3046\u306a\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u304c\u884c\u308f\u308c\u308b\u304b\u4ee3\u8868\u7684\u306a\u4f8b\u3092\u7d39\u4ecb\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>\u2460\u57fa\u677f\u8868\u9762\u306b\u304a\u3051\u308b\u53cd\u5fdc\u7d4c\u8def\u89e3\u6790<\/strong><\/h4>\n\n\n\n<p>ALD\u3067\u306f\u3001\u6709\u6a5f\u91d1\u5c5e\u5316\u5408\u7269\u306a\u3069\u306e\u524d\u99c6\u4f53\uff08\u30d7\u30ea\u30ab\u30fc\u30b5\uff09\u3092\u57fa\u677f\u8868\u9762\u3067\u5316\u5b66\u53cd\u5fdc\u3055\u305b\u3066\u6210\u819c\u3092\u884c\u3044\u307e\u3059\u3002\u305d\u306e\u305f\u3081\u3001\u52b9\u7387\u7684\u306a\u524d\u99c6\u4f53\u3092\u8a2d\u8a08\u3059\u308b\u306b\u306f\u3001\u5206\u5b50\u30ec\u30d9\u30eb\u3067\u8868\u9762\u53cd\u5fdc\u306e\u30e1\u30ab\u30cb\u30ba\u30e0\u3092\u628a\u63e1\u3059\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002\u4f8b\u3048\u3070Matlantis\u3092\u7528\u3044\u305f\u4e8b\u4f8b[ref]\u3068\u3057\u3066\u3001\u6c34\u7d20\u7d42\u7aefSi(111)\u8868\u9762\u3068\u30b3\u30d0\u30eb\u30c8\u524d\u99c6\u4f53\u306e\u53cd\u5fdc\u7d4c\u8def\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u306e\u89e3\u6790\u306b\u3088\u308a\u3001\u5b9f\u969b\u306e\u53cd\u5fdc\u304c\u300cCo\u539f\u5b50\u306e\u8868\u9762\u7d50\u5408\u300d\u3068\u300c\u6c34\u7d20\u304a\u3088\u3073\u30a2\u30ea\u30eb\u57fa\u306e\u8131\u96e2\u300d\u3068\u3044\u30462\u6bb5\u968e\u306e\u30d7\u30ed\u30bb\u30b9\u3092\u7d4c\u3066\u9032\u3080\u3053\u3068\u304c\u53ef\u8996\u5316\u3055\u308c\u307e\u3057\u305f\u3002<\/p>\n\n\n\n<p>\u3055\u3089\u306b\u3001\u7279\u5b9a\u306e\u8868\u9762\u306b\u306e\u307f\u5438\u7740\u3059\u308b\u5206\u5b50\u3092\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3067\u8a55\u4fa1\u3059\u308b\u3053\u3068\u3067\u3001Area-Selective ALD\uff08AS-ALD\uff09\u5411\u3051\u306e\u524d\u99c6\u4f53\u63a2\u7d22\u306a\u3069\u3001\u3088\u308a\u9ad8\u5ea6\u306a\u30d7\u30ed\u30bb\u30b9\u958b\u767a\u3078\u306e\u5fdc\u7528\u3082\u53ef\u80fd\u3067\u3059\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"825\" height=\"480\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2026\/05\/image-6.png\" alt=\"\u57fa\u677f\u8868\u9762\u306b\u304a\u3051\u308b\u53cd\u5fdc\u7d4c\u8def\u89e3\u6790\" class=\"wp-image-6688\"\/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading has-text-align-center\">MC-AFIR\u8a08\u7b97\u306b\u7528\u3044\u305f\u69cb\u9020\u30e2\u30c7\u30eb\u3068\u5f97\u3089\u308c\u305fEQ.(\u51fa\u5c55:<a href=\"https:\/\/matlantis.com\/ja\/calculation\/analysis-of-urface-reaction-mechanism-between-ald-precursor-and-substrate\/ \">https:\/\/matlantis.com\/ja\/calculation\/analysis-of-urface-reaction-mechanism-between-ald-precursor-and-substrate\/ <\/a>)<\/h4>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"lithography\"><strong>\u56de\u8def\u30d1\u30bf\u30fc\u30f3\u3092\u8ee2\u5199\u3059\u308b\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3068\u306f<\/strong><\/h2>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"559\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2026\/05\/pfp_descs_ja-9-1024x559.png\" alt=\"\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306e\u4ed5\u7d44\u307f\" class=\"wp-image-6790\"\/><\/figure>\n\n\n\n<p>\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306f\u3001\u534a\u5c0e\u4f53\u56de\u8def\u306e\u30d1\u30bf\u30fc\u30f3\u3092\u30a6\u30a7\u30cf\u4e0a\u306b\u5f62\u6210\u3059\u308b\u5de5\u7a0b\u3067\u3059\u3002\u5149\u3092\u5229\u7528\u3057\u3066\u56de\u8def\u30d1\u30bf\u30fc\u30f3\u3092\u8ee2\u5199\u3059\u308b\u3053\u3068\u3067\u3001\u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u306e\u5fae\u7d30\u69cb\u9020\u3092\u4f5c\u308a\u51fa\u3057\u307e\u3059\u3002\u5177\u4f53\u7684\u306b\u306f\u3001\u30a6\u30a7\u30cf\u8868\u9762\u306b\u611f\u5149\u6750\u6599\u3067\u3042\u308b\u30ec\u30b8\u30b9\u30c8\u3092\u5857\u5e03\u3057\u3001\u30de\u30b9\u30af\u3092\u901a\u3057\u3066\u5149\u3092\u7167\u5c04\u3059\u308b\u3053\u3068\u3067\u3001\u56de\u8def\u30d1\u30bf\u30fc\u30f3\u306b\u5bfe\u5fdc\u3057\u305f\u30ec\u30b8\u30b9\u30c8\u5f62\u72b6\u3092\u5f62\u6210\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u8fd1\u5e74\u306e\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u6975\u7aef\u7d2b\u5916\u7dda\uff08EUV\uff09\u3092\u7528\u3044\u305f\u9732\u5149\u6280\u8853\u304c\u5c0e\u5165\u3055\u308c\u308b\u306a\u3069\u3001\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u6280\u8853\u3082\u5927\u304d\u304f\u9032\u5316\u3057\u3066\u3044\u307e\u3059\u3002\u5fae\u7d30\u5316\u304c\u9032\u3080\u306b\u3064\u308c\u3066\u3001\u5149\u5b66\u8a2d\u8a08\u3084\u30ec\u30b8\u30b9\u30c8\u6750\u6599\u306e\u7279\u6027\u3001\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u306e\u6700\u9069\u5316\u306a\u3069\u3001\u591a\u304f\u306e\u6280\u8853\u8981\u7d20\u304c\u9ad8\u7cbe\u5ea6\u306b\u5236\u5fa1\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u7279\u306bEUV\u9732\u5149\u3067\u306f\u3001\u5149\u3092\u52b9\u7387\u3088\u304f\u5438\u53ce\u3059\u308b\u30b9\u30ba\uff08Sn\uff09\u306a\u3069\u3092\u9aa8\u683c\u3068\u3057\u305f\u300c\u30e1\u30bf\u30eb\u30ec\u30b8\u30b9\u30c8\u300d\u304c\u6b21\u4e16\u4ee3\u6750\u6599\u3068\u3057\u3066\u6ce8\u76ee\u3055\u308c\u3066\u3044\u307e\u3059[1]\u3002\u8907\u96d1\u306a\u91d1\u5c5e\u932f\u4f53\u3092\u63a2\u7d22\u3059\u308b\u3046\u3048\u3067\u9375\u3068\u306a\u308b\u306e\u304c\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3067\u3059\u3002\u5149\u306e\u5438\u53ce\u73fe\u8c61\u81ea\u4f53\u306f\u91cf\u5b50\u5316\u5b66\u8a08\u7b97\u306e\u9818\u57df\u3067\u3059\u304c\u3001\u6700\u7d42\u7684\u306a\u30d1\u30bf\u30fc\u30f3\u306e\u826f\u3057\u60aa\u3057\u3092\u5de6\u53f3\u3059\u308b\u300c\u5857\u5e03\u6642\u306e\u5747\u4e00\u306a\u819c\u5f62\u6210\u300d\u3084\u300c\u9732\u5149\u5f8c\u306e\u52a0\u71b1\uff08PEB\uff09\u306b\u4f34\u3046\u67b6\u6a4b\u53cd\u5fdc\u300d[3]\u300c\u73fe\u50cf\u6db2\u3068\u306e\u754c\u9762\u73fe\u8c61\u300d[4]\u3068\u3044\u3063\u305f\u5927\u898f\u6a21\u306a\u71b1\u30fb\u69cb\u9020\u30c0\u30a4\u30ca\u30df\u30af\u30b9\u306b\u306f\u3001\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u304c\u5a01\u529b\u3092\u767a\u63ee\u3057\u307e\u3059\u3002\u5b9f\u969b\u306b\u3001\u91d1\u5c5e\u9178\u5316\u7269\u30ec\u30b8\u30b9\u30c8\u306e\u5316\u5b66\u7684\u30fb\u6750\u6599\u7684\u30d7\u30ed\u30bb\u30b9\u306b\u57fa\u3065\u3044\u305f\u78ba\u7387\u7684\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30e2\u30c7\u30eb\u3092\u69cb\u7bc9\u3057\u3001\u5b9f\u9a13\u30c7\u30fc\u30bf\u3068\u7167\u5408\u3059\u308b\u53d6\u308a\u7d44\u307f\u3082\u9032\u3081\u3089\u308c\u3066\u3044\u307e\u3059[5]\u3002\u30d7\u30ed\u30bb\u30b9\u5168\u4f53\u306e\u8907\u96d1\u306a\u53cd\u5fdc\u3092\u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u3067\u53ef\u8996\u5316\u3059\u308b\u3053\u3068\u3067\u3001\u30ec\u30b8\u30b9\u30c8\u958b\u767a\u304c\u52a0\u901f\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p><\/p>\n\n\n\n<h2 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class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"559\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2026\/05\/image-3-1024x559.png\" alt=\"\u4e0d\u8981\u306a\u6750\u6599\u3092\u524a\u308b\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u306f\" class=\"wp-image-6685\"\/><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u30a8\u30c3\u30c1\u30f3\u30b0\u306e\u65b9\u6cd5\u3000\u30a6\u30a7\u30c3\u30c8\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u306e\u9055\u3044<\/strong><\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>\u30a6\u30a7\u30c3\u30c8\u30a8\u30c3\u30c1\u30f3\u30b0<\/strong><\/h4>\n\n\n\n<p>\u30a6\u30a7\u30c3\u30c8\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u3001\u6db2\u4f53\u306e\u85ac\u54c1\u3092\u7528\u3044\u3066\u6750\u6599\u3092\u5316\u5b66\u7684\u306b\u6eb6\u304b\u3057\u3066\u9664\u53bb\u3059\u308b\u65b9\u6cd5\u3067\u3059\u3002\u6bd4\u8f03\u7684\u30b7\u30f3\u30d7\u30eb\u306a\u30d7\u30ed\u30bb\u30b9\u3067\u3042\u308a\u3001\u5747\u4e00\u306b\u6750\u6599\u3092\u9664\u53bb\u3057\u3084\u3059\u3044\u3068\u3044\u3046\u7279\u5fb4\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u4e00\u65b9\u3067\u3001\u85ac\u6db2\u306b\u3088\u308b\u53cd\u5fdc\u306f\u6750\u6599\u306e\u4e0a\u4e0b\u5de6\u53f3\u65b9\u5411\u306b\u3082\u9032\u3080\u305f\u3081\u3001\u524a\u308a\u3059\u304e\u3066\u3057\u307e\u3046\u306a\u3069\u5fae\u7d30\u306a\u30d1\u30bf\u30fc\u30f3\u3092\u9ad8\u7cbe\u5ea6\u306b\u52a0\u5de5\u3059\u308b\u7528\u9014\u306b\u306f\u5411\u304b\u306a\u3044\u5834\u5408\u304c\u3042\u308a\u307e\u3059\u3002\u305d\u306e\u305f\u3081\u3001\u73fe\u5728\u306e\u6700\u5148\u7aef\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u9650\u5b9a\u7684\u306a\u7528\u9014\u3067\u5229\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0<\/strong><\/h4>\n\n\n\n<p>\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u3001\u6db2\u4f53\u3067\u306f\u306a\u304f\u30ac\u30b9\u3092\u7528\u3044\u3066\u6750\u6599\u3092\u9664\u53bb\u3059\u308b\u65b9\u6cd5\u3067\u3059\u3002\u307e\u305a\u3001\u52a0\u5de5\u3059\u308b\u819c\u6750\u6599\u306b\u5408\u308f\u305b\u305f\u30ac\u30b9\u3092\u88c5\u7f6e\u5185\u306b\u5c0e\u5165\u3057\u3001\u305d\u3053\u306b\u96fb\u6c17\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u52a0\u3048\u308b\u3053\u3068\u3067\u30ac\u30b9\u3092\u6d3b\u6027\u5316\u3055\u305b\u307e\u3059\u3002\u3059\u308b\u3068\u30ac\u30b9\u306f<strong>\u30d7\u30e9\u30ba\u30de\u72b6\u614b<\/strong>\u3068\u306a\u308a\u3001\u30a4\u30aa\u30f3\u3084\u30e9\u30b8\u30ab\u30eb\u3068\u3044\u3063\u305f\u53cd\u5fdc\u6027\u306e\u9ad8\u3044\u7c92\u5b50\u304c\u751f\u6210\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3053\u308c\u3089\u306e\u7c92\u5b50\u304c\u6750\u6599\u8868\u9762\u3068\u53cd\u5fdc\u3057\u305f\u308a\u3001\u30a4\u30aa\u30f3\u304c\u57fa\u677f\u8868\u9762\u306b\u5782\u76f4\u65b9\u5411\u304b\u3089\u885d\u7a81\u3057\u305f\u308a\u3059\u308b\u3053\u3068\u3067\u3001\u6750\u6599\u304c\u524a\u308a\u53d6\u3089\u308c\u3066\u3044\u304d\u307e\u3059\u3002\u6a2a\u65b9\u5411\u3078\u306e\u52a0\u5de5\u3092\u6291\u3048\u306a\u304c\u3089\u6750\u6599\u3092\u524a\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u305f\u3081\u3001\u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u306e\u5fae\u7d30\u69cb\u9020\u3092\u9ad8\u7cbe\u5ea6\u306b\u5f62\u6210\u3059\u308b\u3053\u3068\u304c\u53ef\u80fd\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u305d\u306e\u305f\u3081\u73fe\u5728\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u3067\u306f\u3001\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u304c\u5e83\u304f\u5229\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u5fae\u7d30\u5316\u3068\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u306e\u8ab2\u984c<\/strong><\/h3>\n\n\n\n<p>\u534a\u5c0e\u4f53\u306e\u5fae\u7d30\u5316\u304c\u9032\u3080\u306b\u3064\u308c\u3066\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u306e\u5236\u5fa1\u3082\u307e\u3059\u307e\u3059\u96e3\u3057\u304f\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u6570\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30ec\u30d9\u30eb\u306e\u69cb\u9020\u3067\u306f\u3001\u6750\u6599\u3054\u3068\u306e\u53cd\u5fdc\u6027\u3084\u8868\u9762\u3067\u8d77\u3053\u308b\u5316\u5b66\u53cd\u5fdc\u3001\u30d7\u30e9\u30ba\u30de\u4e2d\u306e\u7c92\u5b50\u6319\u52d5\u306a\u3069\u304c\u52a0\u5de5\u7cbe\u5ea6\u306b\u5927\u304d\u304f\u5f71\u97ff\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u307e\u305f\u3001\u3042\u308b\u6750\u6599\u3060\u3051\u3092\u524a\u308a\u53d6\u308a\u5225\u306e\u6750\u6599\u306f\u6b8b\u3059\u300c\u30a8\u30c3\u30c1\u30f3\u30b0\u9078\u629e\u6027\u300d\u3092\u9ad8\u7cbe\u5ea6\u306b\u5236\u5fa1\u3059\u308b\u3053\u3068\u3082\u91cd\u8981\u306a\u8ab2\u984c\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u30a8\u30c3\u30c1\u30f3\u30b0\u3067\u884c\u308f\u308c\u308b\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3068\u306f<\/strong><\/h3>\n\n\n\n<p>\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u30d7\u30e9\u30ba\u30de\u4e2d\u3067\u751f\u6210\u3055\u308c\u305f\u30a4\u30aa\u30f3\u3084\u30e9\u30b8\u30ab\u30eb\u304c\u6750\u6599\u8868\u9762\u3068\u53cd\u5fdc\u3057\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u6750\u6599\u304c\u9664\u53bb\u3055\u308c\u3066\u3044\u304d\u307e\u3059\u3002\u3057\u304b\u3057\u3001\u3053\u3046\u3057\u305f\u53cd\u5fdc\u306f\u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u306e\u8868\u9762\u3067\u8d77\u3053\u308b\u305f\u3081\u3001\u5b9f\u9a13\u3060\u3051\u3067\u8a73\u7d30\u306a\u30e1\u30ab\u30cb\u30ba\u30e0\u3092\u7406\u89e3\u3059\u308b\u3053\u3068\u306f\u5bb9\u6613\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<p>\u305d\u306e\u305f\u3081\u8fd1\u5e74\u3067\u306f\u3001\u539f\u5b50\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3092\u7528\u3044\u3066\u8868\u9762\u53cd\u5fdc\u3084\u6750\u6599\u9664\u53bb\u306e\u30e1\u30ab\u30cb\u30ba\u30e0\u3092\u89e3\u6790\u3059\u308b\u7814\u7a76\u304c\u884c\u308f\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u95a2\u9023\u3057\u305f\u4ee3\u8868\u7684\u306a\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u4f8b\u306b\u306f\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u3082\u306e\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>\u2461SiO\u2082\u306e\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0<\/strong><\/h4>\n\n\n\n<p>\u30d5\u30c3\u5316\u6c34\u7d20\uff08HF\uff09\u30ac\u30b9\u306b\u3088\u308bSiO\u2082\u306e\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u3092Matlantis\u3067\u518d\u73fe\u3057\u307e\u3057\u305f\u3002\u5f93\u6765\u306e\u624b\u6cd5\uff08DFT\uff09\u3067\u306f\u8a08\u7b97\u4e0d\u53ef\u80fd\u306a\u7d0472,000\u539f\u5b50\u3068\u3044\u3046\u5927\u898f\u6a21\u306a\u7cfb\u306b\u304a\u3044\u3066\u3001\u8868\u9762\u306b\u30a8\u30c3\u30c1\u30f3\u30b0\u5b54\u304c\u5f62\u6210\u3055\u308c\u308b\u69d8\u5b50\u3092\u518d\u73fe\u3059\u308b\u3053\u3068\u306b\u6210\u529f\u3057\u307e\u3057\u305f\u3002\u3053\u306e\u5927\u898f\u6a21\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u306b\u3088\u308a\u3001\u6700\u9069\u306a\u30ac\u30b9\u7d44\u6210\u3084\u5165\u5c04\u30a8\u30cd\u30eb\u30ae\u30fc\u3068\u3044\u3063\u305f\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u3092\u52b9\u7387\u7684\u306b\u5c0e\u304d\u51fa\u3059\u3053\u3068\u304c\u53ef\u80fd\u306b\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"576\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2026\/05\/image-5.png\" alt=\"SiO\u2082\u306e\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\" class=\"wp-image-6687\"\/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading has-text-align-center\">HF\u30ac\u30b9\u885d\u7a81\u5f8c\u306eSiO2\u30b9\u30e9\u30d6\u306e\u69cb\u9020\u5909\u5316 (\u51fa\u5c55:<a href=\"https:\/\/matlantis.com\/ja\/calculation\/sio2-dry-etching-simulation-using-lightpfp\/ \">https:\/\/matlantis.com\/ja\/calculation\/sio2-dry-etching-simulation-using-lightpfp\/ <\/a>)<\/h4>\n\n\n\n<p><\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"ion-implantation\"><strong>\u96fb\u6c17\u7279\u6027\u3092\u5236\u5fa1\u3059\u308b\u30a4\u30aa\u30f3\u6ce8\u5165\u3068\u306f<\/strong><\/h2>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"559\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2026\/05\/image-2-1024x559.png\" alt=\"\u96fb\u6c17\u7279\u6027\u3092\u5236\u5fa1\u3059\u308b\u30a4\u30aa\u30f3\u6ce8\u5165\u3068\u306f\" class=\"wp-image-6684\"\/><\/figure>\n\n\n\n<p>\u30a4\u30aa\u30f3\u6ce8\u5165\uff08Ion Implantation\uff09\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u306b\u4e0d\u7d14\u7269\u539f\u5b50\uff08\u30c9\u30fc\u30d1\u30f3\u30c8\uff09\u3092\u5c0e\u5165\u3057\u3066\u96fb\u6c17\u7279\u6027\u3092\u8abf\u6574\u3059\u308b\u5de5\u7a0b\u3067\u3059\u3002\u30db\u30a6\u7d20\uff08B\uff09\u3084\u30ea\u30f3\uff08P\uff09\u3001\u30d2\u7d20\uff08As\uff09\u306a\u3069\u306e\u30a4\u30aa\u30f3\u3092\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u3067\u52a0\u901f\u3057\u3066\u30a6\u30a7\u30cf\u8868\u9762\u306b\u6253\u3061\u8fbc\u3080\u3053\u3068\u3067\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u30bd\u30fc\u30b9\u30fb\u30c9\u30ec\u30a4\u30f3\u9818\u57df\u3084\u30a6\u30a7\u30eb\u69cb\u9020\u306a\u3069\u3001\u30c7\u30d0\u30a4\u30b9\u52d5\u4f5c\u306b\u5fc5\u8981\u306a\u4e0d\u7d14\u7269\u5206\u5e03\u3092\u5f62\u6210\u3057\u307e\u3059\u3002\u306a\u304a\u3001\u6ce8\u5165\u76f4\u5f8c\u306e\u4e0d\u7d14\u7269\u306f\u96fb\u6c17\u7684\u306b\u6a5f\u80fd\u305b\u305a\u7d50\u6676\u69cb\u9020\u3082\u7834\u58ca\u3055\u308c\u3066\u3044\u308b\u305f\u3081\u3001\u30bb\u30c3\u30c8\u3068\u3057\u3066\u884c\u308f\u308c\u308b\u30a2\u30cb\u30fc\u30eb\uff08\u71b1\u51e6\u7406\uff09\u306b\u3088\u3063\u3066\u4e0d\u7d14\u7269\u306e\u6d3b\u6027\u5316\u3068\u6b20\u9665\u306e\u56de\u5fa9\u3092\u884c\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u30a4\u30aa\u30f3\u6ce8\u5165\u3068\u30a2\u30cb\u30fc\u30eb\u3067\u306f\u3001\u6253\u3061\u8fbc\u307e\u308c\u305f\u30a4\u30aa\u30f3\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u3084\u89d2\u5ea6\u3001\u30c9\u30fc\u30ba\u91cf\u3001\u305d\u3057\u3066\u71b1\u51e6\u7406\u306e\u6761\u4ef6\u306a\u3069\u306b\u3088\u3063\u3066\u3001\u4e0d\u7d14\u7269\u306e\u6df1\u3055\u65b9\u5411\u306e\u5206\u5e03\u3084\u57fa\u677f\u3078\u306e\u30c0\u30e1\u30fc\u30b8\u306e\u56de\u5fa9\u5ea6\u5408\u3044\u304c\u5909\u5316\u3057\u307e\u3059\u3002\u5fae\u7d30\u5316\u304c\u9032\u3080\u306b\u3064\u308c\u3066\u3001\u6570nm\u30ec\u30d9\u30eb\u3067\u306e\u4e0d\u7d14\u7269\u5206\u5e03\u306e\u5236\u5fa1\u304c\u6c42\u3081\u3089\u308c\u308b\u3088\u3046\u306b\u306a\u3063\u3066\u304a\u308a\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u6700\u9069\u5316\u304c\u307e\u3059\u307e\u3059\u91cd\u8981\u306b\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3053\u3046\u3057\u305f\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u3082\u3001\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u306b\u3088\u308b\u539f\u5b50\u30ec\u30d9\u30eb\u306e\u89e3\u6790\u304c\u6d3b\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u4ee5\u4e0b\u306e\u30a4\u30aa\u30f3\u7167\u5c04\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\uff08\u2462\uff09\u306e\u3088\u3046\u306b\u3001\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30a4\u30aa\u30f3\u304c\u57fa\u677f\u306b\u885d\u7a81\u3057\u305f\u969b\u306e\u539f\u5b50\u5909\u4f4d\u3084\u30ab\u30b9\u30b1\u30fc\u30c9\u640d\u50b7\u3001\u6ce8\u5165\u3055\u308c\u305f\u30a4\u30aa\u30f3\u306e\u505c\u6b62\u4f4d\u7f6e\u3084\u305d\u306e\u5f8c\u306e\u71b1\u306b\u3088\u308b\u62e1\u6563\u306a\u3069\u3092\u5206\u5b50\u52d5\u529b\u5b66\u8a08\u7b97\u3067\u8ffd\u8de1\u3059\u308b\u3053\u3068\u3067\u3001\u5b9f\u9a13\u3067\u306f\u76f4\u63a5\u89b3\u5bdf\u304c\u96e3\u3057\u3044\u30d7\u30ed\u30bb\u30b9\u306e\u8a73\u7d30\u3092\u7406\u89e3\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>\u2462\u30a4\u30aa\u30f3\u7167\u5c04\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3<\/strong><\/h4>\n\n\n\n<p>\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u304a\u3051\u308b\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30a4\u30aa\u30f3\u3068\u6750\u6599\u8868\u9762\u306e\u885d\u7a81\u904e\u7a0b\u3092\u7406\u89e3\u3059\u308b\u305f\u3081\u3001\u5206\u5b50\u52d5\u529b\u5b66\uff08MD\uff09\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u304c\u6d3b\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002Matlantis\u3067\u306f\u3001Si(111)\u8868\u9762\u3078\u306e\u30a2\u30eb\u30b4\u30f3\uff08Ar\uff09\u7167\u5c04\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u304c\u53ef\u80fd\u3067\u3059\u3002\u5165\u5c04\u30a8\u30cd\u30eb\u30ae\u30fc\u3084\u89d2\u5ea6\u3092\u5909\u5316\u3055\u305b\u306a\u304c\u3089\u975e\u5e73\u8861\u30c0\u30a4\u30ca\u30df\u30af\u30b9\u3092\u8a08\u7b97\u3059\u308b\u3053\u3068\u3067\u3001\u30a4\u30aa\u30f3\u885d\u7a81\u306b\u3088\u308b\u8868\u9762\u640d\u50b7\u3084\u539f\u5b50\u5909\u4f4d\u306a\u3069\u306e\u7269\u7406\u7684\u52b9\u679c\u3092\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u8a55\u4fa1\u3057\u3001\u30d7\u30ed\u30bb\u30b9\u6700\u9069\u5316\u306b\u7e4b\u3052\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-medium\"><img loading=\"lazy\" decoding=\"async\" width=\"209\" height=\"300\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2026\/05\/image-4-209x300.png\" alt=\"Si\u8868\u9762\u3078\u306eAr\u539f\u5b50\u7167\u5c04\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\" class=\"wp-image-6686\"\/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading has-text-align-center\">Si\u8868\u9762\u3078\u306eAr\u539f\u5b50\u7167\u5c04\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\uff08\u51fa\u5c55\uff1apfcc-extras\u8a08\u7b97\u4e8b\u4f8b\u3088\u308a\uff09<\/h4>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"cmp\"><strong>\u8868\u9762\u3092\u5e73\u5766\u5316\u3059\u308bCMP\u3068\u306f<\/strong><\/h2>\n\n\n\n<p>\u534a\u5c0e\u4f53\u30c1\u30c3\u30d7\u306e\u5185\u90e8\u3067\u306f\u3001\u6210\u819c\u3084\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u3088\u3063\u3066\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3084\u914d\u7dda\u3001\u7d76\u7e01\u819c\u306a\u3069\u306e\u5c64\u304c\u4f55\u5ea6\u3082\u7a4d\u307f\u91cd\u306d\u3089\u308c\u3066\u3044\u304d\u307e\u3059\u3002\u3057\u304b\u3057\u3001\u3053\u3046\u3057\u305f\u5de5\u7a0b\u3092\u7e70\u308a\u8fd4\u3059\u3068\u30a6\u30a7\u30cf\u8868\u9762\u306b\u306f\u5f90\u3005\u306b\u51f9\u51f8\u304c\u751f\u3058\u3066\u3057\u307e\u3044\u307e\u3059\u3002\u8868\u9762\u306e\u51f9\u51f8\u304c\u5927\u304d\u304f\u306a\u308b\u3068\u3001\u56de\u8def\u30d1\u30bf\u30fc\u30f3\u306e\u7cbe\u5ea6\u304c\u4f4e\u4e0b\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u305d\u3053\u3067\u884c\u308f\u308c\u308b\u306e\u304cCMP\uff08Chemical Mechanical Polishing\uff09\u5de5\u7a0b\u3067\u3059\u3002CMP\u306f\u3001\u30a6\u30a7\u30cf\u8868\u9762\u3092\u5316\u5b66\u7684\u30fb\u6a5f\u68b0\u7684\u306b\u7814\u78e8\u3059\u308b\u3053\u3068\u3067\u3001\u8868\u9762\u3092\u5e73\u5766\u306b\u6574\u3048\u308b\u30d7\u30ed\u30bb\u30b9\u3067\u3059\u3002\u6210\u819c\u3084\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u3088\u3063\u3066\u5f62\u6210\u3055\u308c\u305f\u5c64\u69cb\u9020\u306e\u51f9\u51f8\u3092\u9664\u53bb\u3057\u3001\u6b21\u306e\u5de5\u7a0b\u3067\u3082\u9ad8\u7cbe\u5ea6\u306b\u56de\u8def\u30d1\u30bf\u30fc\u30f3\u3092\u5f62\u6210\u3067\u304d\u308b\u72b6\u614b\u3092\u4f5c\u308b\u5f79\u5272\u3092\u62c5\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>CMP\u3067\u306f\u3001\u56de\u8ee2\u3059\u308b\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u4e0a\u306b\u30a6\u30a7\u30cf\u3092\u62bc\u3057\u5f53\u3066\u306a\u304c\u3089\u3001\u30b9\u30e9\u30ea\u30fc\u3068\u547c\u3070\u308c\u308b\u7814\u78e8\u6db2\u3092\u7528\u3044\u3066\u7814\u78e8\u3092\u884c\u3044\u307e\u3059\u3002\u30b9\u30e9\u30ea\u30fc\u306b\u306f\u7814\u78e8\u7c92\u5b50\uff08\u7825\u7c92\uff09\u3084\u5316\u5b66\u53cd\u5fdc\u3092\u4fc3\u9032\u3059\u308b\u85ac\u54c1\u304c\u542b\u307e\u308c\u3066\u304a\u308a\u3001\u6750\u6599\u8868\u9762\u3092\u5316\u5b66\u53cd\u5fdc\u306b\u3088\u3063\u3066\u67d4\u3089\u304b\u304f\u3057\u306a\u304c\u3089\u3001\u6a5f\u68b0\u7684\u306a\u6469\u64e6\u306b\u3088\u3063\u3066\u5c11\u3057\u305a\u3064\u524a\u308a\u53d6\u3063\u3066\u3044\u304d\u307e\u3059\u3002\u3053\u306e\u5316\u5b66\u4f5c\u7528\u3068\u6a5f\u68b0\u4f5c\u7528\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u3067\u3001\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30ec\u30d9\u30eb\u306e\u7cbe\u5ea6\u3067\u8868\u9762\u3092\u5e73\u5766\u5316\u3059\u308b\u3053\u3068\u304c\u53ef\u80fd\u306b\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>CMP\u306f\u3001\u5358\u306a\u308b\u7814\u78e8\u3067\u306f\u306a\u304f\u91d1\u5c5e\u914d\u7dda\u5c64\u306e\u5f62\u6210\u306b\u304a\u3044\u3066\u3082\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059\u3002\u4f8b\u3048\u3070\u9285\u914d\u7dda\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u914d\u7dda\u6e9d\u306b\u9285\u3092\u57cb\u3081\u8fbc\u3093\u3060\u5f8c\u3001\u4f59\u5206\u306a\u9285\u3092CMP\u306b\u3088\u3063\u3066\u9664\u53bb\u3059\u308b\u3053\u3068\u3067\u914d\u7dda\u69cb\u9020\u3092\u5f62\u6210\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"683\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2026\/05\/CMP-1024x683.jpg\" alt=\"CMP\uff08Chemical Mechanical Polishing\uff09\u306e\u6982\u8981\n\" class=\"wp-image-6701\"\/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading has-text-align-center\">CMP\uff08Chemical Mechanical Polishing\uff09\u306e\u6982\u8981<\/h4>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>CMP\u30d7\u30ed\u30bb\u30b9\u306e\u8ab2\u984c<\/strong><\/h3>\n\n\n\n<p>\u534a\u5c0e\u4f53\u306e\u5fae\u7d30\u5316\u304c\u9032\u3080\u306b\u3064\u308c\u3066\u3001CMP\u30d7\u30ed\u30bb\u30b9\u306e\u5236\u5fa1\u3082\u307e\u3059\u307e\u3059\u96e3\u3057\u304f\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u4f8b\u3048\u3070\u3001\u6750\u6599\u306b\u3088\u3063\u3066\u7814\u78e8\u901f\u5ea6\u304c\u7570\u306a\u308b\u305f\u3081\u3001\u3042\u308b\u6750\u6599\u3060\u3051\u304c\u524a\u308c\u3059\u304e\u3066\u3057\u307e\u3063\u305f\u308a\u3068\u3044\u3063\u305f\u73fe\u8c61\u304c\u554f\u984c\u306b\u306a\u308b\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u73fe\u8c61\u306f\u3001\u914d\u7dda\u306e\u4fe1\u983c\u6027\u3084\u96fb\u6c17\u7279\u6027\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>CMP\u3067\u306f\u7814\u78e8\u30d1\u30c3\u30c9\u3001\u30b9\u30e9\u30ea\u30fc\u7c92\u5b50\u3001\u6750\u6599\u8868\u9762\u306e\u76f8\u4e92\u4f5c\u7528\u304c\u8907\u96d1\u306b\u95a2\u4fc2\u3057\u3066\u3044\u307e\u3059\u3002\u7814\u78e8\u7c92\u5b50\u306e\u5927\u304d\u3055\u3084\u6fc3\u5ea6\u3001\u5316\u5b66\u53cd\u5fdc\u306e\u9032\u884c\u3001\u6a5f\u68b0\u7684\u306a\u6469\u64e6\u6761\u4ef6\u306a\u3069\u3001\u591a\u304f\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u304c\u7814\u78e8\u7d50\u679c\u306b\u5f71\u97ff\u3059\u308b\u305f\u3081\u3001\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u306e\u6700\u9069\u5316\u304c\u91cd\u8981\u306a\u8ab2\u984c\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002&nbsp;<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>CMP\u3067\u884c\u308f\u308c\u308b\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3<\/strong><\/h3>\n\n\n\n<p>CMP\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3092\u6d3b\u7528\u3057\u305f\u7814\u7a76\u3082\u9032\u3081\u3089\u308c\u3066\u3044\u307e\u3059\u3002\u4f8b\u3048\u3070\u3001\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u4e2d\u306e\u7c92\u5b50\u3068\u6750\u6599\u8868\u9762\u3068\u306e\u76f8\u4e92\u4f5c\u7528\u3084\u3001\u8868\u9762\u306e\u5316\u5b66\u53cd\u5fdc\u306b\u3088\u308b\u6750\u6599\u9664\u53bb\u30e1\u30ab\u30cb\u30ba\u30e0\u306a\u3069\u3092\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u89e3\u6790\u3059\u308b\u3053\u3068\u3067\u3001\u7814\u78e8\u901f\u5ea6\u3084\u9078\u629e\u6027\u306e\u9055\u3044\u3092\u7406\u89e3\u3059\u308b\u7814\u7a76\u304c\u884c\u308f\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>\u2463 SiO\u2082\u7c92\u5b50\u306b\u3088\u308bSi\u7814\u78e8\u306e\u5206\u5b50\u52d5\u529b\u5b66\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3<\/strong><\/h4>\n\n\n\n<p>\u3053\u306e\u89e3\u6790\u3067\u306f\u3001SiO\u2082\u7c92\u5b50\u306b\u5782\u76f4\u306e\u8377\u91cd\u3068\u6c34\u5e73\u306e\u99c6\u52d5\u529b\u3092\u304b\u3051\u3066\u57fa\u677f\u4e0a\u3092\u79fb\u52d5\u3055\u305b\u3001\u5b9f\u969b\u306e\u7814\u78e8\u904e\u7a0b\u3092\u30e2\u30c7\u30eb\u5316\u3057\u307e\u3059\u3002\u8a08\u7b97\u306e\u7d50\u679c\u3001\u99c6\u52d5\u529b\u304c\u5927\u304d\u3044\u307b\u3069\u591a\u304f\u306eSi\u539f\u5b50\u304c\u9664\u53bb\u3055\u308c\u308b\u7269\u7406\u7684\u6319\u52d5\u304c\u78ba\u8a8d\u3055\u308c\u307e\u3057\u305f\u3002<\/p>\n\n\n\n<p>\u7279\u7b46\u3059\u3079\u304d\u70b9\u3068\u3057\u3066\u3001\u3053\u306e\u50be\u5411\u306fMatlantis\u306e\u6a19\u6e96\u30e2\u30c7\u30eb\uff08PFP\uff09\u3068\u8a08\u7b97\u30b3\u30b9\u30c8\u3092\u6291\u3048\u305f\u8efd\u91cf\u30e2\u30c7\u30eb\uff08LightPFP\uff09\u306e\u53cc\u65b9\u3067\u4e00\u81f4\u3057\u3066\u304a\u308a\u3001LightPFP\u3067\u3082\u7814\u78e8\u30d7\u30ed\u30bb\u30b9\u3092\u518d\u73fe\u3067\u304d\u308b\u3053\u3068\u304c\u793a\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"585\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2026\/05\/image-7-1024x585.png\" alt=\"CMP\u306eMD\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u4e8b\u4f8b\" class=\"wp-image-6689\"\/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading has-text-align-center\">CMP\u306eMD\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u4e8b\u4f8b (\u51fa\u5178:<a href=\"https:\/\/arxiv.org\/abs\/2510.23064\" rel=\"nofollow noopener\" target=\"_blank\">https:\/\/arxiv.org\/abs\/2510.23064<\/a> )<\/h4>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"cleaning\"><strong>\u8868\u9762\u72b6\u614b\u3092\u5236\u5fa1\u3059\u308b\u6d17\u6d44<\/strong><\/h2>\n\n\n\n<p>\u534a\u5c0e\u4f53\u88fd\u9020\u3067\u306f\u3001\u6210\u819c\u3084\u30a8\u30c3\u30c1\u30f3\u30b0\u306a\u3069\u306e\u5404\u5de5\u7a0b\u306e\u524d\u5f8c\u306b\u6d17\u6d44\u30d7\u30ed\u30bb\u30b9\u304c\u7e70\u308a\u8fd4\u3057\u884c\u308f\u308c\u307e\u3059\u3002\u6d17\u6d44\u306f\u5358\u306a\u308b\u6c5a\u67d3\u9664\u53bb\u3067\u306f\u306a\u304f\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u3084\u6709\u6a5f\u6b8b\u6e23\u3001\u91d1\u5c5e\u4e0d\u7d14\u7269\u3092\u9664\u53bb\u3057\u3001\u6b21\u5de5\u7a0b\u306b\u9069\u3057\u305f\u754c\u9762\u72b6\u614b\u3092\u5f62\u6210\u3059\u308b\u91cd\u8981\u306a\u5f79\u5272\u3092\u62c5\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u6d17\u6d44\u30d7\u30ed\u30bb\u30b9\u306b\u306f\u4e3b\u306b\u6e7f\u5f0f\u6d17\u6d44\u3068\u4e7e\u5f0f\u6d17\u6d44\u304c\u3042\u308a\u3001\u85ac\u6db2\u306b\u3088\u3063\u3066\u6c5a\u67d3\u7269\u8cea\u3092\u9664\u53bb\u3059\u308b\u6e7f\u5f0f\u6d17\u6d44\u306f\u9ad8\u3044\u6d17\u6d44\u80fd\u529b\u3092\u6301\u3064\u4e00\u65b9\u3067\u3001\u5fae\u7d30\u5316\u304c\u9032\u3093\u3060\u30d1\u30bf\u30fc\u30f3\u69cb\u9020\u3067\u306f\u4e7e\u71e5\u5de5\u7a0b\u306b\u304a\u3051\u308b\u8868\u9762\u5f35\u529b\u304c\u69cb\u9020\u5909\u5f62\u3084\u5012\u58ca\uff08\u30d1\u30bf\u30fc\u30f3\u30b3\u30e9\u30d7\u30b9\uff09\u3092\u5f15\u304d\u8d77\u3053\u3059\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002\u305d\u306e\u305f\u3081\u8fd1\u5e74\u3067\u306f\u3001\u30d7\u30e9\u30ba\u30de\u3084\u30ac\u30b9\u53cd\u5fdc\u3092\u5229\u7528\u3057\u305f\u4e7e\u5f0f\u6d17\u6d44\u3084\u3001\u8868\u9762\u5f35\u529b\u306e\u5f71\u97ff\u3092\u4f4e\u6e1b\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u8a2d\u8a08\u306e\u91cd\u8981\u6027\u304c\u9ad8\u307e\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u307e\u305f\u3001\u6d17\u6d44\u6761\u4ef6\u306b\u3088\u3063\u3066\u9178\u5316\u819c\u306e\u9664\u53bb\u3084\u8868\u9762\u7d42\u7aef\u72b6\u614b\u304c\u5909\u5316\u3057\u3001\u305d\u306e\u5f8c\u306e\u6210\u819c\u521d\u671f\u6210\u9577\u3084\u754c\u9762\u6e96\u4f4d\u5bc6\u5ea6\u3001\u5bc6\u7740\u6027\u3001\u63a5\u89e6\u62b5\u6297\u306a\u3069\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u3053\u3068\u3082\u77e5\u3089\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3053\u306e\u3088\u3046\u306b\u6d17\u6d44\u5de5\u7a0b\u3067\u306f\u3001\u6b8b\u6e23\u9664\u53bb\u3060\u3051\u3067\u306a\u304f\u5438\u7740\u30fb\u8131\u96e2\u53cd\u5fdc\u3084\u8868\u9762\u7d42\u7aef\u5f62\u6210\u3001\u3055\u3089\u306b\u306f\u5fae\u7d30\u69cb\u9020\u5b89\u5b9a\u6027\u3068\u3044\u3063\u305f\u8907\u6570\u306e\u539f\u5b50\u30ec\u30d9\u30eb\u73fe\u8c61\u304c\u95a2\u4e0e\u3057\u3066\u304a\u308a\u3001\u8fd1\u5e74\u3067\u306f\u3053\u308c\u3089\u306e\u7406\u89e3\u3084\u6700\u9069\u5316\u306b\u3082\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u304c\u6d3b\u7528\u3055\u308c\u308b\u5834\u9762\u304c\u5e83\u304c\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"simulation-examples\"><strong>\u4f01\u696d\u306e\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3092\u6d3b\u7528\u3057\u305f\u7814\u7a76\u958b\u767a\u4f8b<\/strong><\/h2>\n\n\n\n<p>\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u5fae\u7d30\u5316\u304c\u9032\u3080\u73fe\u5728\u3067\u306f\u3001\u819c\u539a\u6570\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u306e\u5236\u5fa1\u3084\u754c\u9762\u69cb\u9020\u306e\u9055\u3044\u304c\u30c7\u30d0\u30a4\u30b9\u6027\u80fd\u3084\u6b69\u7559\u307e\u308a\u306b\u5927\u304d\u304f\u5f71\u97ff\u3059\u308b\u3088\u3046\u306b\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u305d\u306e\u305f\u3081\u3001\u8868\u9762\u53cd\u5fdc\u3001\u6b20\u9665\u751f\u6210\u3001\u62e1\u6563\u3001\u754c\u9762\u5f62\u6210\u3068\u3044\u3063\u305f\u539f\u5b50\u30ec\u30d9\u30eb\u306e\u6750\u6599\u6319\u52d5\u3092\u7406\u89e3\u3059\u308b\u3053\u3068\u304c\u3001\u30d7\u30ed\u30bb\u30b9\u958b\u767a\u306b\u304a\u3044\u3066\u307e\u3059\u307e\u3059\u91cd\u8981\u306b\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3053\u3046\u3057\u305f\u73fe\u8c61\u306e\u591a\u304f\u306f\u5b9f\u9a13\u3060\u3051\u3067\u76f4\u63a5\u89b3\u5bdf\u3059\u308b\u3053\u3068\u304c\u96e3\u3057\u3044\u305f\u3081\u3001\u6750\u6599\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3092\u6d3b\u7528\u3057\u3066\u30d7\u30ed\u30bb\u30b9\u4e2d\u3067\u8d77\u3053\u308b\u53cd\u5fdc\u3084\u69cb\u9020\u5909\u5316\u3092\u89e3\u6790\u3059\u308b\u53d6\u308a\u7d44\u307f\u304c\u5e83\u304c\u3063\u3066\u3044\u307e\u3059\u3002\u8fd1\u5e74\u3067\u306f\u3001\u5927\u898f\u6a21\u304b\u3064\u9ad8\u901f\u306a\u539f\u5b50\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u304c\u53ef\u80fd\u306b\u306a\u3063\u305f\u3053\u3068\u3067\u3001\u5f93\u6765\u306f\u56f0\u96e3\u3060\u3063\u305f\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u306e\u6bd4\u8f03\u691c\u8a0e\u3084\u6750\u6599\u8a2d\u8a08\u306b\u3082\u5fdc\u7528\u304c\u9032\u3093\u3067\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u5177\u4f53\u7684\u306b\u534a\u5c0e\u4f53\u306e\u7814\u7a76\u958b\u767a\u3067\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u304c\u6d3b\u7528\u3055\u308c\u3066\u3044\u308b\u8ad6\u6587\u3092\u4e8b\u4f8b\u3068\u3057\u3066\u3054\u7d39\u4ecb\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p><\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u3010\u4e8b\u4f8b\u63d0\u4f9b\u8005\uff1a\u682a\u5f0f\u4f1a\u793eSCREEN\u30db\u30fc\u30eb\u30c7\u30a3\u30f3\u30b0\u30b9\u3011\u5206\u5b50\u8a08\u7b97\u3068\u6a5f\u68b0\u5b66\u7fd2\u306b\u3088\u308bSi\u8868\u9762\u306b\u5bfe\u3059\u308b\u4f4e\u5438\u7740\u30a8\u30cd\u30eb\u30ae\u30fc\u5206\u5b50\u306e\u30c7\u30fc\u30bf\u99c6\u52d5\u578b\u63a2\u7d22<\/strong><\/h3>\n\n\n\n<figure class=\"wp-block-image aligncenter size-medium\"><img loading=\"lazy\" decoding=\"async\" width=\"247\" height=\"300\" src=\"https:\/\/matlantis.com\/wp-content\/uploads\/2026\/05\/image-9-247x300.png\" alt=\"\" class=\"wp-image-6779\"\/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading 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class=\"wp-block-embed is-type-wp-embed is-provider-matlantis wp-block-embed-matlantis\"><div class=\"wp-block-embed__wrapper\">\n<blockquote class=\"wp-embedded-content\" data-secret=\"7nAxDVK1B6\"><a href=\"https:\/\/matlantis.com\/ja\/calculation\/silicon-tma-tel\/\">\u30b7\u30ea\u30b3\u30f3\u9178\u5316\u819c\u8868\u9762\u3092\u6a21\u3057\u305f\u7cfb\u3067\u306eTMA\u306e\u53cd\u5fdc\u89e3\u6790<\/a><\/blockquote><iframe loading=\"lazy\" class=\"wp-embedded-content\" sandbox=\"allow-scripts\" security=\"restricted\" style=\"position: absolute; visibility: hidden;\" title=\"&#8220;\u30b7\u30ea\u30b3\u30f3\u9178\u5316\u819c\u8868\u9762\u3092\u6a21\u3057\u305f\u7cfb\u3067\u306eTMA\u306e\u53cd\u5fdc\u89e3\u6790&#8221; &#8212; Matlantis\" src=\"https:\/\/matlantis.com\/ja\/calculation\/silicon-tma-tel\/embed\/#?secret=eMMfORNMYS#?secret=7nAxDVK1B6\" data-secret=\"7nAxDVK1B6\" width=\"500\" height=\"282\" frameborder=\"0\" marginwidth=\"0\" marginheight=\"0\" scrolling=\"no\"><\/iframe>\n<\/div><\/figure>\n\n\n\n<p><\/p>\n\n\n\n<p><\/p>\n\n\n\n<p>\u5f15\u7528<\/p>\n\n\n\n<p>[1] S. Kim et al., &#8220;Organometallic and coordinative photoresist materials for EUV lithography and related photolytic mechanisms,&#8221; <em>Coordination Chemistry Reviews<\/em>, vol. 493, 215307, 2023.<a href=\"https:\/\/doi.org\/10.1016\/j.ccr.2023.215307\" target=\"_blank\" rel=\"noreferrer noopener nofollow\">https:\/\/doi.org\/10.1016\/j.ccr.2023.215307<\/a><\/p>\n\n\n\n<p>[2] S. Grzeskowiak et al., &#8220;Multinuclear Tin-Based Macrocyclic Organometallic Resist for EUV Photolithography,&#8221; <em>ACS Applied Materials &amp; Interfaces<\/em>, 2024.<a href=\"https:\/\/pmc.ncbi.nlm.nih.gov\/articles\/PMC11393934\/\" target=\"_blank\" rel=\"noreferrer noopener nofollow\">https:\/\/pmc.ncbi.nlm.nih.gov\/articles\/PMC11393934\/<\/a><\/p>\n\n\n\n<p>[3] D. Kim et al., &#8220;Computational approach on PEB process in EUV resist: multi-scale simulation,&#8221; <em>Proc. SPIE<\/em>, vol. 10143, 2017.<a href=\"https:\/\/doi.org\/10.1117\/12.2258029\" target=\"_blank\" rel=\"noreferrer noopener nofollow\">https:\/\/doi.org\/10.1117\/12.2258029<\/a><\/p>\n\n\n\n<p>[4] J. Lee et al., &#8220;Coarse-Grained Modeling of EUV Patterning Process Reflecting Photochemical Reactions and Chain Conformations,&#8221; <em>Polymers<\/em>, vol. 15, no. 9, 2023.<a href=\"https:\/\/pmc.ncbi.nlm.nih.gov\/articles\/PMC10180770\/\" target=\"_blank\" rel=\"noreferrer noopener nofollow\">https:\/\/pmc.ncbi.nlm.nih.gov\/articles\/PMC10180770\/<\/a><\/p>\n\n\n\n<p>[5] C. D. Needham et al., &#8220;Advanced simulations using an improved metal oxide photoresist model,&#8221; <em>Proc. 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