{"id":2282,"date":"2024-07-11T11:30:40","date_gmt":"2024-07-11T02:30:40","guid":{"rendered":"https:\/\/matlantis.com\/?post_type=research&p=2282"},"modified":"2026-02-04T13:18:13","modified_gmt":"2026-02-04T04:18:13","slug":"quantitative-analysis-of-plasma-enhanced-chemical-vapor-deposition-mechanisms-quantum-chemical-and-plasma-fluid-dynamics-investigation-on-tetraethoxysilane-o2-plasma","status":"publish","type":"research","link":"https:\/\/matlantis.com\/ja\/publications\/quantitative-analysis-of-plasma-enhanced-chemical-vapor-deposition-mechanisms-quantum-chemical-and-plasma-fluid-dynamics-investigation-on-tetraethoxysilane-o2-plasma\/","title":{"rendered":"Quantitative analysis of plasma-enhanced chemical vapor deposition mechanisms: Quantum chemical and plasma-fluid dynamics investigation on tetraethoxysilane\/O2 plasma"},"content":{"rendered":"","protected":false},"featured_media":3733,"template":"","meta":{"_acf_changed":true},"research_category":[14,121,122],"class_list":["post-2282","research","type-research","status-publish","has-post-thumbnail","hentry","research_category-research-using","research_category-121","research_category-122"],"acf":[],"_links":{"self":[{"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/research\/2282","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/research"}],"about":[{"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/types\/research"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/media\/3733"}],"wp:attachment":[{"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/media?parent=2282"}],"wp:term":[{"taxonomy":"research_category","embeddable":true,"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/research_category?post=2282"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}