{"id":3441,"date":"2025-03-17T20:59:57","date_gmt":"2025-03-17T11:59:57","guid":{"rendered":"https:\/\/matlantis.com\/?post_type=research&#038;p=3441"},"modified":"2026-02-04T11:52:46","modified_gmt":"2026-02-04T02:52:46","slug":"sustained-area-selectivity-in-atomic-layer-deposition-of-ir-films-utilization-of-dual-effects-of-o3-in-deposition-and-etching","status":"publish","type":"research","link":"https:\/\/matlantis.com\/ja\/publications\/sustained-area-selectivity-in-atomic-layer-deposition-of-ir-films-utilization-of-dual-effects-of-o3-in-deposition-and-etching\/","title":{"rendered":"Sustained Area-Selectivity in Atomic Layer Deposition of Ir Films: Utilization of Dual Effects of O<sub>3<\/sub> in Deposition and Etching"},"content":{"rendered":"","protected":false},"featured_media":3704,"template":"","meta":{"_acf_changed":true},"research_category":[14,121,122,120],"class_list":["post-3441","research","type-research","status-publish","has-post-thumbnail","hentry","research_category-research-using","research_category-121","research_category-122","research_category-120"],"acf":[],"_links":{"self":[{"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/research\/3441","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/research"}],"about":[{"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/types\/research"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/media\/3704"}],"wp:attachment":[{"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/media?parent=3441"}],"wp:term":[{"taxonomy":"research_category","embeddable":true,"href":"https:\/\/matlantis.com\/ja\/wp-json\/wp\/v2\/research_category?post=3441"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}