Theme Overview: In semiconductor manufacturing processes, a high degree of cleanliness is required to leave no residue on the Si substrate, and the application of new chemicals is being considered. On the other hand, experimentally evaluating and selecting from a vast number of material candidates is time-consuming and financially costly, making efficient investigation difficult. As a method for exploring the vast material space, sequential experimental analysis using Bayesian optimization (BO) is being considered... Read more Data-driven search for low-adsorption energy molecules on Si surfaces using molecular calculations and machine learning