Simulation Case Study: SiO₂ Dry Etching Simulation Using LightPFP

We have published a new Matlantis application case on our Simulation Case Studies page. In this case, we analyzed the dry etching of SiO₂ using LightPFP, a function that allows the construction of machine learning potentials specialized for particular applications. LightPFP enables large-scale calculations of up to 72,000 atoms.

For the full article, click here: SiO₂ Dry Etching Simulation Using LightPFP