I spoke at the 7th CVD Reaction Subcommittee Workshop, "Fundamentals of CVD and ALD Processes."

Kota Matsumoto of the Technical Solutions Department Matlantis Corporation will give a lecture at the 7th training seminar "Fundamentals of CVD/ALD Processes" (Friday, June 26th, held online), hosted by the CVD Reaction Subcommittee of the Reaction Engineering Division, Society of Chemical Engineers, Japan.

This workshop is designed for beginners, such as students and young employees, and aims to provide a systematic understanding of the fundamentals of CVD and ALD processes. In addition to CVD reactions, reaction kinetics analysis, raw material selection, equipment design, and the basics and applications of ALD and ASD, the workshop will also cover surface reaction analysis simulations, which are attracting attention as process development tools due to advances in computational science.

Matlantis will present on CVD/ALD surface reaction analysis using general-purpose machine learning potentials, from fundamentals to practical examples.

This workshop will be held online. If you are interested in CVD/ALD processes or surface reaction analysis, please consider participating.

The deadline for registration is Monday, June 22, 2026, at noon.

Presentation title

"Fundamentals and Examples of CVD/ALD Surface Reaction Analysis Using General-Purpose Machine Learning Potentials"

This lecture will introduce the application of Matlantis to surface reaction analysis in CVD and ALD processes, incorporating fundamental concepts, using keywords such as machine learning potential, reaction pathway exploration, transition state theory, rate constants, GRRM, surface reactions, and molecular dynamics.

Presenter

【Outline】

Event Name: CVD Reaction Subcommittee 7th Workshop "Fundamentals of CVD and ALD Processes"
Date and time: June 26, 2026 (Friday) 8:45-17:00
Venue: Online (Zoom)
Organized by: The Society of Chemical Engineers, Japan, Reaction Engineering Division, CVD Reaction Subcommittee
Co-sponsored by: CVD Study Group, Cat-CVD Study Group
Sponsored by: The Plasma Electronics Division of the Japan Society of Applied Physics, and the Atomic Layer Process Research Group of the Japan Society of Applied Physics.

Matlantis's presentation time: 12:30 - 14:00

Event details and registration

For event details and registration, please check the page below.
https://cvd7seminar.peatix.com/