2025.6.19
Research Articles & Use Cases
[Calculation example published] SiO₂ dry etching simulation using LightPFP
A new Matlantis application example has been published on the calculation example page.
In this example, we use LightPFP, a function that builds machine learning potentials specialized for specific applications, to analyze dry etching of SiO 2. LightPFP allows large-scale calculations of 72,000 atoms.
Read the full article here: Simulation of SiO₂ dry etching using LightPFP

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