Research Articles & Use Cases

[Calculation example published] SiO₂ dry etching simulation using LightPFP

A new Matlantis application example has been published on the calculation example page.
In this example, we use LightPFP, a function that builds machine learning potentials specialized for specific applications, to analyze dry etching of SiO 2. LightPFP allows large-scale calculations of 72,000 atoms.

Read the full article here: Simulation of SiO₂ dry etching using LightPFP

SiO2 dry etching simulation using LightPFP