Presentation at the 85th Autumn Meeting of the Japan Society of Applied Physics

PFCC will be giving a talk at the 85th Autumn Meeting of the Japan Society of Applied Physics, to be held in Niigata from Monday, September 16, 2024.

Academic information

Date: September 16th (Monday) to September 20th (Friday), 2024
Venue: Toki Messe and two other venues & online

Presentation information

Date and time: September 18th (Wednesday) 14:00 ~ 14:15
Presentation venue: Toki Messe Conference Building A23
Presentation title: Reaction analysis and molecular design of ALD precursors using a general-purpose machine learning force field
Summary of the presentation:
Atomic layer deposition (ALD) is a widely used process for forming thin metal films in semiconductor device manufacturing. In this study, we analyzed the surface chemical reaction mechanism of ALD precursors using a general-purpose machine learning force field (PreFerred Potential), and from the findings obtained, we propose a more effective molecular design method for ALD precursors.

Presenter

Yusuke Asano

Preferred Computational Chemistry (PFCC)
Senior Manager

After graduating from the Graduate School of Sophia University, he worked at a domestic chemical manufacturer, where he was involved in research and development of semiconductor materials and the launch of a materials informatics division. After joining ENEOS (then JXTG Energy) in 2019, he worked on new material design using computational chemistry.