Matlantis Webinar｜Unveiling Semiconductor Processesat the Atomic Level～The Cutting Edge of AI Simulation～

Event Outline

In recent years, materials development has become more difficult as the required properties become more sophisticated, but there is also a demand for more efficient development. In the semiconductor field in particular, as device miniaturization reaches the atomic layer level, it becomes necessary to control complex surface reactions such as thin film formation and etching. However, there are time and cost limitations in finding optimal solutions from a huge number of parameters through the conventional method of repeated experimentation and evaluation.

To address these challenges, Matlantis proposes accelerating research and development by utilizing atomistic simulations using generalized machine learning potential (PFP). Leveraging the accuracy and speed of PFP, it is applied to the semiconductor field to simulate detailed surface reaction pathways of ALD precursors and etching behavior with hydrogen fluoride. Simulations provide insight into why something happens and what happens when materials or conditions are changed, allowing you to quickly plan the next steps in development.

In this seminar, we will introduce application examples of PFP, mainly in the semiconductor field, and first share what can be seen through simulation. We hope that adding a simulation perspective to your experience will help you find the shortest route to your ideal material.

Speakers

Matlantis Corporation

Makoto Sato

After obtaining his PhD in Science from Rikkyo University in 2011, he worked as a postdoctoral researcher at Rikkyo University and Nagoya University, researching physical organic chemistry and organic molecular catalysts. During this time, he also served as a part-time lecturer at Rikkyo University and Ochanomizu University. In 2018, he worked at a semiconductor materials company, and in 2023 at the Central Technical Research Institute of ENEOS Corporation, before joining PFCC (now Matlantis). He is currently engaged in computational work in the areas of polymer and semiconductor materials, where organic chemical reactions are important.

Webinar Details

Apply here  ※Conducted in Japanese